Title:
CHARGED-PARTICLE BEAM DEVICE AND CLEANING METHOD
Document Type and Number:
WIPO Patent Application WO/2018/235194
Kind Code:
A1
Abstract:
This charged-particle beam device comprises: a stage for placing a sample thereon; a cleaner for removing a contaminating substance present on the sample; and a stage control unit for moving the stage, thereby adjusting the relative positional relationship between the cleaner and the sample when using the cleaner.
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Inventors:
MORIKAWA AKINARI (JP)
HOSOYA KOTARO (JP)
HOSOYA KOTARO (JP)
Application Number:
PCT/JP2017/022854
Publication Date:
December 27, 2018
Filing Date:
June 21, 2017
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/20
Foreign References:
| JP2002012971A | 2002-01-15 | |||
| JP2002310959A | 2002-10-23 | |||
| JP2003157788A | 2003-05-30 | |||
| JP2015159108A | 2015-09-03 | |||
| JPH11204400A | 1999-07-30 |
Attorney, Agent or Firm:
HIRAKI & ASSOCIATES (JP)
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