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Patent Searching and Data


Title:
CHARGED-PARTICLE BEAM DEVICE AND CROSS-SECTIONAL SHAPE ESTIMATION PROGRAM
Document Type and Number:
WIPO Patent Application WO/2019/176212
Kind Code:
A1
Abstract:
The objective of the present invention is to use brightness images acquired under different energy conditions to estimate the size of a defect in the depth direction in a simple manner. A charged-particle beam device according to the present invention determines the brightness ratio for each irradiation position on a brightness image while changing parameters varying the signal amount, estimates the position of the defect in the depth direction on the basis of the parameters at which the brightness ratio is at a minimum, and estimates the size of the defect in the depth direction on the basis of the magnitude of the brightness ratio (see FIG. 5).

Inventors:
YOKOSUKA Toshiyuki (6-6, Marunouchi 1-chome, Chiyoda-k, Tokyo 80, 〒1008280, JP)
KAWANO Hajime (24-14 Nishi Shimbashi 1-chome, Minato-k, Tokyo 17, 〒1058717, JP)
KUROSAWA Kouichi (24-14 Nishi Shimbashi 1-chome, Minato-k, Tokyo 17, 〒1058717, JP)
KAZUMI Hideyuki (24-14 Nishi Shimbashi 1-chome, Minato-k, Tokyo 17, 〒1058717, JP)
Application Number:
JP2018/046658
Publication Date:
September 19, 2019
Filing Date:
December 18, 2018
Export Citation:
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Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
International Classes:
H01J37/22; G01N23/2251; G01N23/2255; H01J37/05; H01J37/244; H01J37/28
Attorney, Agent or Firm:
HIRAKI & ASSOCIATES (Atago Green Hills MORI Tower 32F, 5-1 Atago 2-chome, Minato-k, Tokyo 32, 〒1056232, JP)
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