Title:
CHARGED-PARTICLE BEAM DEVICE AND CROSS-SECTIONAL SHAPE ESTIMATION PROGRAM
Document Type and Number:
WIPO Patent Application WO/2019/176212
Kind Code:
A1
Abstract:
The objective of the present invention is to use brightness images acquired under different energy conditions to estimate the size of a defect in the depth direction in a simple manner. A charged-particle beam device according to the present invention determines the brightness ratio for each irradiation position on a brightness image while changing parameters varying the signal amount, estimates the position of the defect in the depth direction on the basis of the parameters at which the brightness ratio is at a minimum, and estimates the size of the defect in the depth direction on the basis of the magnitude of the brightness ratio (see FIG. 5).
Inventors:
YOKOSUKA TOSHIYUKI (JP)
KAWANO HAJIME (JP)
KUROSAWA KOUICHI (JP)
KAZUMI HIDEYUKI (JP)
KAWANO HAJIME (JP)
KUROSAWA KOUICHI (JP)
KAZUMI HIDEYUKI (JP)
Application Number:
PCT/JP2018/046658
Publication Date:
September 19, 2019
Filing Date:
December 18, 2018
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/22; G01N23/2251; G01N23/2255; H01J37/05; H01J37/244; H01J37/28
Foreign References:
| JP2014032833A | 2014-02-20 | |||
| JPH05290786A | 1993-11-05 | |||
| JPH08329875A | 1996-12-13 |
Other References:
SUZUKI, MAKOTO ET AL.: "Secondary electron imaging of embedded defects in carbon nanofiber via interconnects", APPLIED PHYSICS LETTERS, vol. 93, no. 26, December 2008 (2008-12-01), pages 263110, XP012113051, doi:10.1063/1.3063053
Attorney, Agent or Firm:
HIRAKI & ASSOCIATES (JP)
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