Title:
CHARGED PARTICLE BEAM DEVICE, DEFECT SUPERVISION DEVICE, AND MANAGEMENT SERVER
Document Type and Number:
WIPO Patent Application WO/2012/008096
Kind Code:
A1
Abstract:
The present invention provides a charged particle beam device that prevents process problems arising from defects being overlooked or other deterioration in review performance from being magnified by detecting potentials for malfunctions or faults that affect device performance during sample process sequences and providing feedback in realtime. At each step in the charged particle beam device process, items to be monitored that denote the runtime status of the device, such as the electron beam control state, the degree of offset when the wafer is positioned, and the degree of defect coordinate error offset, are monitored during the sample process sequence and history information thereof stored. During the process sequence, comparison determinations of the values of the items to be monitored with previous history information corresponding to the items to be monitored are carried out using preset determination criteria, and alerts issued when degrees of fluctuation from the previous history information exceed reference ranges.
Inventors:
MIYAKE, Kozo (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
三宅 孝造 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社 日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
KONISHI, Junko (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
小西 潤子 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社 日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
三宅 孝造 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社 日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
KONISHI, Junko (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
小西 潤子 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社 日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
Application Number:
JP2011/003552
Publication Date:
January 19, 2012
Filing Date:
June 22, 2011
Export Citation:
Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
株式会社 日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
MIYAKE, Kozo (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
三宅 孝造 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社 日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
KONISHI, Junko (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
株式会社 日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
MIYAKE, Kozo (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
三宅 孝造 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社 日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
KONISHI, Junko (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
International Classes:
H01J37/24; H01J37/22; H01J37/28; H01L21/66
Attorney, Agent or Firm:
INOUE, Manabu et al. (6-1, Marunouchi 1-chome, Chiyoda-k, Tokyo 20, 〒1008220, JP)
Download PDF:
Claims: