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Title:
CHARGED PARTICLE BEAM DEVICE, ELECTRON BEAM GENERATION DEVICE, X-RAY SOURCE, X-RAY DEVICE, AND METHOD FOR MANUFACTURING STRUCTURE
Document Type and Number:
WIPO Patent Application WO/2018/066135
Kind Code:
A1
Abstract:
This charged particle beam device has: a partition wall section for forming a depressurized or vacuum region; an ejection source, which is disposed in the depressurized or vacuum region, and which ejects charged particles to the inside of the partition wall section; an excitation member disposed outside of the depressurized or vacuum region by having the partition wall section therebetween; and an internal magnetic pole, which is disposed inside of the depressurized or vacuum region, and which serves as a magnetic pole due to a magnetic field generated by the excitation member.

Inventors:
YAMADA, Atsushi (15-3 Konan 2-chome, Minato-k, Tokyo 90, 〒1086290, JP)
UMEMOTO, Takaaki (15-3 Konan 2-chome, Minato-k, Tokyo 90, 〒1086290, JP)
SUZUKI, Shohei (15-3 Konan 2-chome, Minato-k, Tokyo 90, 〒1086290, JP)
ENDO, Takeshi (15-3 Konan 2-chome, Minato-k, Tokyo 90, 〒1086290, JP)
MIURA, Satoshi (15-3 Konan 2-chome, Minato-k, Tokyo 90, 〒1086290, JP)
Application Number:
JP2016/080000
Publication Date:
April 12, 2018
Filing Date:
October 07, 2016
Export Citation:
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Assignee:
NIKON CORPORATION (15-3, Konan 2-chome Minato-k, Tokyo 90, 〒1086290, JP)
International Classes:
H01J35/14; G01N23/04; H01J35/16; H05G1/02
Foreign References:
JP2016018626A2016-02-01
JP2008234981A2008-10-02
JPH05182625A1993-07-23
JP2014212011A2014-11-13
JPS53137660A1978-12-01
Attorney, Agent or Firm:
NAGAI, Fuyuki et al. (NAGAI & ASSOCIATES, SHINAGAWA CRYSTAL SQUARE BLDG. Suite No. 901 1-6-41, Kounan, Minato-k, Tokyo 75, 〒1080075, JP)
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