Title:
CHARGED PARTICLE BEAM DEVICE, ELECTRON BEAM GENERATION DEVICE, X-RAY SOURCE, X-RAY DEVICE, AND METHOD FOR MANUFACTURING STRUCTURE
Document Type and Number:
WIPO Patent Application WO/2018/066135
Kind Code:
A1
Abstract:
This charged particle beam device has: a partition wall section for forming a depressurized or vacuum region; an ejection source, which is disposed in the depressurized or vacuum region, and which ejects charged particles to the inside of the partition wall section; an excitation member disposed outside of the depressurized or vacuum region by having the partition wall section therebetween; and an internal magnetic pole, which is disposed inside of the depressurized or vacuum region, and which serves as a magnetic pole due to a magnetic field generated by the excitation member.
Inventors:
YAMADA ATSUSHI (JP)
UMEMOTO TAKAAKI (JP)
SUZUKI SHOHEI (JP)
ENDO TAKESHI (JP)
MIURA SATOSHI (JP)
UMEMOTO TAKAAKI (JP)
SUZUKI SHOHEI (JP)
ENDO TAKESHI (JP)
MIURA SATOSHI (JP)
Application Number:
PCT/JP2016/080000
Publication Date:
April 12, 2018
Filing Date:
October 07, 2016
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
H01J35/14; G01N23/04; H01J35/16; H05G1/02
Foreign References:
| JP2016018626A | 2016-02-01 | |||
| JP2008234981A | 2008-10-02 | |||
| JPH05182625A | 1993-07-23 | |||
| JP2014212011A | 2014-11-13 | |||
| JPS53137660A | 1978-12-01 |
Attorney, Agent or Firm:
NAGAI, Fuyuki et al. (JP)
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