Title:
CHARGED PARTICLE BEAM DEVICE AND INSTALLATION METHOD
Document Type and Number:
WIPO Patent Application WO/2016/174921
Kind Code:
A1
Abstract:
Provided is a charged particle beam device that is small, high performance, and easy to transport. A charged particle beam device (100) is provided with a detachable body unit (15) and an auxiliary unit (14), the body unit (15) housing a functional unit related to charged particle beams, and the auxiliary unit (14) housing a power source unit (9).
Inventors:
YABU SHUHEI (JP)
KOGA NAOTO (JP)
AKATSU MITSUO (JP)
TAKAHIRA ISAO (JP)
TOMITA SHINICHI (JP)
NODA HIROYUKI (JP)
MASUDA AI (JP)
KOGA NAOTO (JP)
AKATSU MITSUO (JP)
TAKAHIRA ISAO (JP)
TOMITA SHINICHI (JP)
NODA HIROYUKI (JP)
MASUDA AI (JP)
Application Number:
PCT/JP2016/056694
Publication Date:
November 03, 2016
Filing Date:
March 04, 2016
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/248; H01J37/16
Foreign References:
| JPH0982258A | 1997-03-28 | |||
| JP2007003397A | 2007-01-11 | |||
| JPS6179450U | 1986-05-27 | |||
| JPS5596558U | 1980-07-04 |
Attorney, Agent or Firm:
HIRAKI Yusuke et al. (JP)
Yusuke Hiraki (JP)
Yusuke Hiraki (JP)
Download PDF:
Previous Patent: DISPLAYED ROTATIONAL SPEED CONTROL APPARATUS FOR VEHICLE
Next Patent: MULTILAYER GLASS
Next Patent: MULTILAYER GLASS