Title:
CHARGED PARTICLE BEAM DEVICE AND METHOD FOR MEASURING THICKNESS OF SAMPLE
Document Type and Number:
WIPO Patent Application WO/2018/229848
Kind Code:
A1
Abstract:
This charged particle beam device is provided with: a storage unit that stores relationship information indicating a relationship between the intensity or the intensity ratio of a charged particle signal and the thickness of a layer disposed on a sample, wherein the charged particle signal is obtained when the layer is irradiated with a charged particle beam; and a computing unit that uses the relationship information and the intensity or the intensity ratio of the charged particle signal to calculate the thickness of the layer as the thickness of the sample.
Inventors:
SATO TAKAHIRO (JP)
NOMAGUCHI TSUNENORI (JP)
NOMAGUCHI TSUNENORI (JP)
Application Number:
PCT/JP2017/021737
Publication Date:
December 20, 2018
Filing Date:
June 13, 2017
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
G01N23/225; G01B15/02
Domestic Patent References:
| WO2006073063A1 | 2006-07-13 | |||
| WO2014175150A1 | 2014-10-30 |
Foreign References:
| JP2014041092A | 2014-03-06 | |||
| JPH02266208A | 1990-10-31 | |||
| JPH07333120A | 1995-12-22 |
Attorney, Agent or Firm:
HIRAKI & ASSOCIATES (JP)
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