CHARGED PARTICLE BEAM DEVICE, CHARGED PARTICLE BEAM DEVICE OPTICAL ELEMENT, AND CHARGED PARTICLE BEAM DEVICE MEMBER PRODUCTION METHOD

WIPO Patent Application WO/2016/117099

A1

The objective of the invention is to provide a charged particle beam device, a charged particle beam device optical element, and a charged particle beam device member production method, whereby an improvement of performance of the charged particle beam device is achieved by forming the member with high precision. In order to achieve this objective, proposed is the charged particle beam device comprising an optical element for altering a charged particle beam emitted from a charged particle source, and a vacuum container containing the optical element, wherein the optical element contains an electrode or a voltage-applied member (102, 104) comprising a first glass containing vanadium, a second glass containing vanadium configuring at least one among the vacuum container and a support member (180) supporting the voltage-applied member (102, 104).

JPH01255140	ARC CHAMBER FOR ION SOURCE
WO/2011/158739	CHARGED PARTICLE DEVICE

ICHIMURA TAKASHI (JP)
ITO HIROYUKI (JP)
KATO SHINICHI (JP)
MURAKOSHI HISAYA (JP)
FUJIEDA TADASHI (JP)
MIYAKE TATSUYA (JP)

PCT/JP2015/051750

July 28, 2016

January 23, 2015

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HITACHI HIGH TECH CORP (JP)

H01J37/16; H01J9/18; H01J37/065; H01J37/147

JP2000268755A	2000-09-29
JP2012033298A	2012-02-16
JP2014049683A	2014-03-17
JP2008016251A	2008-01-24
JP2001223154A	2001-08-17
JP2001266739A	2001-09-28

INOUE Manabu et al. (JP)
Manabu Inoue (JP)

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