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Patent Searching and Data


Title:
CHARGED PARTICLE BEAM DEVICE AND SAMPLE OBSERVATION METHOD
Document Type and Number:
WIPO Patent Application WO/2014/041882
Kind Code:
A1
Abstract:
Provided is a charged particle beam device having a function for observing a sample in a gas atmosphere or a liquid state, wherein the purpose of the present invention is observing the circumstances of introducing liquid to a dried sample and the subsequent wetting thereof, and preventing scattering of the charged particle beam due to an excess of moisture entering into the area between a diaphragm and the sample. The present invention has a guide-in guide-out part (300) for guiding in and out a desired liquid or gas from a direction below or to the side of a sample (6), and has a configuration for emitting a primary charged particle beam to the sample (6) in a state where the sample (6) and a diaphragm (10) are not in contact.

Inventors:
OMINAMI YUSUKE (JP)
KAWANISHI SHINSUKE (JP)
SUZUKI HIROYUKI (JP)
HOSOYA KOHTARO (JP)
FURIKI MASANARI (JP)
Application Number:
JP2013/068587
Publication Date:
March 20, 2014
Filing Date:
July 08, 2013
Export Citation:
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Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/20; H01J37/16; H01J37/18
Foreign References:
JP2011175809A2011-09-08
JP2005174657A2005-06-30
JP2006147430A2006-06-08
JPH0850875A1996-02-20
JP2009129799A2009-06-11
Attorney, Agent or Firm:
INOUE Manabu et al. (JP)
Manabu Inoue (JP)
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