Title:
CHARGED PARTICLE BEAM DEVICE, SAMPLE STAGE UNIT, AND SAMPLE OBSERVATION METHOD
Document Type and Number:
WIPO Patent Application WO/2014/080987
Kind Code:
A1
Abstract:
This charged particle beam device is provided with a charged particle optical lens barrel (2) which generates a primary charged particle beam, a housing (7) which is internally evacuated by a vacuum pump (4), a first diaphragm (10) which forms a part of the housing (7) and which can maintain the air-tight state of the internal space thereof, and a second diaphragm (50) arranged between the first diaphragm (10) and a sample (6), wherein the primary charged particle beam generated in the charged particle optical lens barrel (2) is transmitted or passed through the first diaphragm (10) and the second diaphragm (50) and irradiated onto the sample (6) in a state in contact with the second diaphragm (50).
Inventors:
OMINAMI YUSUKE (JP)
KONOMI MAMI (JP)
KAWANISHI SHINSUKE (JP)
SUZUKI HIROYUKI (JP)
KONOMI MAMI (JP)
KAWANISHI SHINSUKE (JP)
SUZUKI HIROYUKI (JP)
Application Number:
PCT/JP2013/081411
Publication Date:
May 30, 2014
Filing Date:
November 21, 2013
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/28; H01J37/16; H01J37/20
Domestic Patent References:
WO2012140822A1 | 2012-10-18 |
Foreign References:
JP2004515049A | 2004-05-20 | |||
JP2008047411A | 2008-02-28 | |||
JP2008218342A | 2008-09-18 | |||
JPS59146145A | 1984-08-21 | |||
JP2007113952A | 2007-05-10 | |||
JP2011243483A | 2011-12-01 |
Attorney, Agent or Firm:
ISONO Michizo (JP)
Michizo Isono (JP)
Michizo Isono (JP)
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