Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
CHARGED PARTICLE BEAM DEVICE AND SCANNING ELECTRON MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2018/025849
Kind Code:
A1
Abstract:
This charged particle beam device comprises an electron source (11) emitting a primary electron beam (12), an upper objective lens (18) and a lower objective lens (26) focusing the primary electron beam (12) emitted from the electron source (11) onto a sample, a sample stage (24) whereon the sample (23) is placed, and a shielding electrode (51) and an electric potential plate (22) allowing the primary electron beam (12) to pass therethrough. Disposed from the sample stage side are the shielding electrode (51) and the electric potential plate (22) in this order. An electric potential difference is applied between the sample stage (24) and the electric potential plate (22). An electric potential is applied to the shielding electrode (51) to mitigate the electric field arising in the sample (23) due to the electric potential difference.

Inventors:
KUMAMOTO, Kazuya (INC. 745, Aojicho, Kusatsu-sh, Shiga 41, 〒5250041, JP)
MATSUDA, Sadayoshi (INC. 745, Aojicho, Kusatsu-sh, Shiga 41, 〒5250041, JP)
Application Number:
JP2017/027864
Publication Date:
February 08, 2018
Filing Date:
August 01, 2017
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
MATSUSADA PRECISION, INC. (745 Aojicho, Kusatsu-shi Shiga, 41, 〒5250041, JP)
International Classes:
H01J37/04; H01J37/141; H01J37/18; H01J37/20; H01J37/28
Attorney, Agent or Firm:
HARAKENZO WORLD PATENT & TRADEMARK (Daiwa Minamimorimachi Building, 2-6 Tenjinbashi 2-chome Kita, Kita-ku, Osaka-sh, Osaka 41, 〒5300041, JP)
Download PDF: