Title:
CHARGED PARTICLE BEAM DEVICE AND SOUNDPROOFING COVER
Document Type and Number:
WIPO Patent Application WO/2011/158458
Kind Code:
A1
Abstract:
Disclosed is a soundproofing cover that encloses apparatuses (20; 70) including charged particle beam devices, which are used in a clean room. The soundproofing cover comprises lateral walls (11-14) and a ceiling face (15) that enclose the space wherein the apparatuses are positioned and where soundproofing is desired; a sound absorbing structure part (40), further comprising a plurality of apertures (41a; 46a), facing into the space where soundproofing is desired, and hollow parts (41d; 46d; 46c) that are joined to the plurality of apertures, is disposed in the bottom of the ceiling face; and the sound absorbing structure part has a structure that is specialized to the frequency of a standing wave that arises in the space that is enclosed with the lateral walls and the ceiling face. The sound absorbing structure part employs a member that does not produce dust. Thus, it is possible to provide a soundproofing cover that is capable of efficacious soundproofing and that minimizes the production of dust.
Inventors:
MUTO, Daisuke (HITACHI LTD., 1-1, Omika-cho 7-chome, Hitachi-sh, Ibaraki 92, 〒3191292, JP)
武藤 大輔 (〒92 茨城県日立市大みか町七丁目１番１号 株式会社 日立製作所 日立研究所内 Ibaraki, 〒3191292, JP)
WATANABE, Masanori (HITACHI LTD., 1-1, Omika-cho 7-chome, Hitachi-sh, Ibaraki 92, 〒3191292, JP)
渡部 眞徳 (〒92 茨城県日立市大みか町七丁目１番１号 株式会社 日立製作所 日立研究所内 Ibaraki, 〒3191292, JP)
武藤 大輔 (〒92 茨城県日立市大みか町七丁目１番１号 株式会社 日立製作所 日立研究所内 Ibaraki, 〒3191292, JP)
WATANABE, Masanori (HITACHI LTD., 1-1, Omika-cho 7-chome, Hitachi-sh, Ibaraki 92, 〒3191292, JP)
渡部 眞徳 (〒92 茨城県日立市大みか町七丁目１番１号 株式会社 日立製作所 日立研究所内 Ibaraki, 〒3191292, JP)
Application Number:
JP2011/003137
Publication Date:
December 22, 2011
Filing Date:
June 03, 2011
Export Citation:
Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
株式会社 日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
MUTO, Daisuke (HITACHI LTD., 1-1, Omika-cho 7-chome, Hitachi-sh, Ibaraki 92, 〒3191292, JP)
武藤 大輔 (〒92 茨城県日立市大みか町七丁目１番１号 株式会社 日立製作所 日立研究所内 Ibaraki, 〒3191292, JP)
WATANABE, Masanori (HITACHI LTD., 1-1, Omika-cho 7-chome, Hitachi-sh, Ibaraki 92, 〒3191292, JP)
株式会社 日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
MUTO, Daisuke (HITACHI LTD., 1-1, Omika-cho 7-chome, Hitachi-sh, Ibaraki 92, 〒3191292, JP)
武藤 大輔 (〒92 茨城県日立市大みか町七丁目１番１号 株式会社 日立製作所 日立研究所内 Ibaraki, 〒3191292, JP)
WATANABE, Masanori (HITACHI LTD., 1-1, Omika-cho 7-chome, Hitachi-sh, Ibaraki 92, 〒3191292, JP)
International Classes:
H01J37/09; G10K11/16; G10K11/162; H01J37/16
Attorney, Agent or Firm:
INOUE, Manabu et al. (6-1, Marunouchi 1-chome, Chiyoda-k, Tokyo 20, 〒1008220, JP)
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Claims: