Title:
CHARGED PARTICLE BEAM DEVICE WITH RETARDING FIELD ANALYZER
Document Type and Number:
WIPO Patent Application WO2005122208
Kind Code:
A3
Abstract:
The invention provides a charged particle beam device (100) to inspect or structure a specimen (102) with a primary charged particle beam (104) propagating along an optical axis (108); a beam tube element (130) having a tube voltage (VT); and a retarding field analyzer (1, 50) in the vicinity of the beam tube element (130) to detect secondary charged particles (2,105) generated by the primary charged particle beam (104) on the specimen (102). According to the invention, the retarding field analyzer (1, 50) thereby comprises an entrance grid electrode (10) at a second voltage (V2); at least one filter grid electrode (4) at a first voltage (V1); a charged particle detector (8) to detect the secondary charged particles (2,105); and at least one further electrode element (122, 122a, 122b, 152, 152a, 152b, 170, 170a, 170b) arranged between the entrance grid electrode (10) and the at least one filter grid electrode (4). The at least one further electrode element (122, 122a, 122b, 152, 152a, 152b, 170, 170a, 170b, 180) reduces the size of the stray fields regions (41) in the retarding electric field region (20) to improve the energy resolution of the retarding field analyzer (1, 50). The improvement of the energy resolution is significant, in particular when the beam tube element (130) is part of a high voltage beam tube.
Inventors:
DEGENHARDT RALF (DE)
FEUERBAUM HANS-PETER (DE)
HAMBACH DIRK (DE)
KOEGLER WALTER (DE)
MUNACK HARRY (DE)
SALVESEN CARLO (DE)
FEUERBAUM HANS-PETER (DE)
HAMBACH DIRK (DE)
KOEGLER WALTER (DE)
MUNACK HARRY (DE)
SALVESEN CARLO (DE)
Application Number:
PCT/EP2005/006247
Publication Date:
April 13, 2006
Filing Date:
June 10, 2005
Export Citation:
Assignee:
LBLEITERPRUEFTECHNIK MBH ICT I (DE)
DEGENHARDT RALF (DE)
FEUERBAUM HANS-PETER (DE)
HAMBACH DIRK (DE)
KOEGLER WALTER (DE)
MUNACK HARRY (DE)
SALVESEN CARLO (DE)
DEGENHARDT RALF (DE)
FEUERBAUM HANS-PETER (DE)
HAMBACH DIRK (DE)
KOEGLER WALTER (DE)
MUNACK HARRY (DE)
SALVESEN CARLO (DE)
International Classes:
H01J37/244; G01R31/305; H01J37/28; G01R31/307
Foreign References:
| US3582649A | 1971-06-01 | |||
| US3681600A | 1972-08-01 | |||
| US6545277B1 | 2003-04-08 | |||
| US4546254A | 1985-10-08 | |||
| GB1370360A | 1974-10-16 | |||
| US4179604A | 1979-12-18 | |||
| EP0262365A2 | 1988-04-06 | |||
| EP0263942A1 | 1988-04-20 | |||
| DE3138990A1 | 1983-04-14 | |||
| EP1271603A1 | 2003-01-02 | |||
| US4540885A | 1985-09-10 | |||
| US3805068A | 1974-04-16 | |||
| EP0843335A1 | 1998-05-20 | |||
| US4442355A | 1984-04-10 | |||
| US20020011565A1 | 2002-01-31 | |||
| EP0918350A1 | 1999-05-26 |
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PATENT ABSTRACTS OF JAPAN vol. 013, no. 356 (E - 803) 9 August 1989 (1989-08-09)
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PATENT ABSTRACTS OF JAPAN vol. 018, no. 045 (P - 1681) 24 January 1994 (1994-01-24)
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