Title:
CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2012/014373
Kind Code:
A1
Abstract:
This charged particle beam device comprises: a beam scan scheduling means (120), for scheduling a beam scan on the basis of an inputted scan condition; and a programmable sequencer (109) that carries out a beam scan control according to a beam scan schedule that is generated by the beam scan scheduling means. The scan scheduling means computes scan line reference coordinates (203) per scan line unit on the basis of a scan condition, and issues a scan period trigger (207). The programmable sequencer controls the timing of the supply of the scan line reference coordinates, and the scan location within the line per pixel unit, on the basis of line scan sequence information and the scan period trigger provided by the scan scheduling means. It is thus possible to provide an inspection device wherein diverse scan sequences are made flexibly changeable according to inspection conditions thereof, and wherein scan period misalignment, which interferes with charge stability, is simultaneously eliminated to the extent possible, allowing a beam scan to be carried out in a stable scan period.
Inventors:
GUNJI, Yoshiro (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
郡司 芳郎 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社 日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
郡司 芳郎 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社 日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
Application Number:
JP2011/003553
Publication Date:
February 02, 2012
Filing Date:
June 22, 2011
Export Citation:
Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
株式会社 日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
GUNJI, Yoshiro (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
株式会社 日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
GUNJI, Yoshiro (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
International Classes:
H01J37/147; H01J37/20; H01J37/22; H01J37/28
Attorney, Agent or Firm:
INOUE, Manabu et al. (6-1, Marunouchi 1-chome, Chiyoda-k, Tokyo 20, 〒1008220, JP)
Claims: