Title:
CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2013/157474
Kind Code:
A1
Abstract:
A charged particle beam device (1) comprises a charged particle optical lens tube (10), a support casing body (20) which mounts the charged particle optical lens tube (10), and an inner insertion casing body (30) which is inserted within the support casing body (20). A first aperture member (15) is disposed near the center of an objective lens magnetic field, and a second aperture member (31) is disposed to close off from the outside an aperture part which is disposed upon the upper face of the inner insertion case body (30). Then, when a primary charged particle beam (12) is illuminated upon a sample (60) which is positioned on the lower face side of the second aperture member (31), secondary charged particles which are radiated are detected by a detector (16).
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Inventors:
OMINAMI YUSUKE (JP)
KAWANISHI SHINSUKE (JP)
OHTAKI TOMOHISA (JP)
AJIMA MASAHIKO (JP)
ITO SUKEHIRO (JP)
KAWANISHI SHINSUKE (JP)
OHTAKI TOMOHISA (JP)
AJIMA MASAHIKO (JP)
ITO SUKEHIRO (JP)
Application Number:
PCT/JP2013/060914
Publication Date:
October 24, 2013
Filing Date:
April 11, 2013
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/18; H01J37/09; H01J37/16
Foreign References:
| JP2006147430A | 2006-06-08 | |||
| JP2010509709A | 2010-03-25 | |||
| JP2006318903A | 2006-11-24 | |||
| JPH11185682A | 1999-07-09 | |||
| JP2009289468A | 2009-12-10 |
Attorney, Agent or Firm:
ISONO Michizo (JP)
Michizo Isono (JP)
Michizo Isono (JP)
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