Title:
CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2014/181685
Kind Code:
A1
Abstract:
In the present invention, an evacuation structure of a charged particle beam device is provided with: a vacuum chamber to which a charged particle source is provided; a vacuum piping connected to the vacuum chamber; a main vacuum pump that is connected to the vacuum chamber via the vacuum piping and evacuates the inside of the vacuum chamber; a non-evaporative getter pump provided in the vacuum piping between the vacuum chamber and the main vacuum pump; and a coarse evacuation port connected to a position in the vacuum piping between the vacuum chamber and the non-evaporative getter pump. The coarse evacuation port is provided with a coarse evacuation valve for opening and closing the coarse evacuation port, and a leak valve for opening the vacuum chamber to the atmosphere.
Inventors:
TAKAHOKO YOSHIHIRO (JP)
KOBAYASHI DAISUKE (JP)
KIMURA MASASHI (JP)
SASAJIMA MASAHIRO (JP)
KOBAYASHI DAISUKE (JP)
KIMURA MASASHI (JP)
SASAJIMA MASAHIRO (JP)
Application Number:
PCT/JP2014/061393
Publication Date:
November 13, 2014
Filing Date:
April 23, 2014
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/18
Domestic Patent References:
| WO2009153939A1 | 2009-12-23 | |||
| WO2011102077A1 | 2011-08-25 | |||
| WO2007086254A1 | 2007-08-02 |
Foreign References:
| JP2009004112A | 2009-01-08 | |||
| JPS49107949U | 1974-09-14 | |||
| JP2010177004A | 2010-08-12 |
Attorney, Agent or Firm:
HIRAKI Yusuke et al. (JP)
Yusuke Hiraki (JP)
Yusuke Hiraki (JP)
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