CHARGED PARTICLE BEAM DEVICE - HITACHI HIGH TECH CORP

Title:

CHARGED PARTICLE BEAM DEVICE

Document Type and Number:

WIPO Patent Application WO/2016/121009

Kind Code:

A1

Abstract:

Provided is a charged particle beam device that enables, even if a visual field includes therein a plurality of regions having different secondary electron emission conditions, the setting of appropriate energy filter conditions adapted to each of these regions. The charged particle beam device is equipped with a detector (508) for detecting charged particles (507) obtained on the basis of scanning, over a sample (506), a charged particle beam (502) emitted from a charged particle source (501), and an energy filter (509) for filtering by energy the charged particles (507) emitted from the sample (506). Index values are determined for the plurality of regions contained within the scanning region of the charged particle beam (502), and, for each of a plurality of energy filter conditions, differences are calculated between the plurality of index values and the reference index values that have been set for each of the plurality of regions.

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Inventors:

YOKOSUKA TOSHIYUKI (JP)
KAZUMI HIDEYUKI (JP)
MIZUHARA YUZURU (JP)
KAWANO HAJIME (JP)

Application Number:

PCT/JP2015/052250

Publication Date:

August 04, 2016

Filing Date:

January 28, 2015

Export Citation:

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Assignee:

HITACHI HIGH TECH CORP (JP)

International Classes:

H01J37/28; H01J37/05

Foreign References:

JP5584159B2

2014-09-03

Attorney, Agent or Firm:

INOUE Manabu et al. (JP)
Manabu Inoue (JP)

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