Title:
CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/006408
Kind Code:
A1
Abstract:
This charged particle beam device is provided with: a plurality of detectors (110a-110d) for detecting secondary particles (111a-111b), the detectors (110a-110d) being disposed in a symmetrical manner around the optical axis of a primary charged particle beam (104) on the charged particle source (101) side of an objective lens (109); electrodes (112a-112d) for forming an electric field oriented in directions corresponding to each of the plurality of detectors, the electrodes (112a-112d) being provided on the travel routes of secondary particles from a sample (108) to the detectors; and a control power supply (149) for impressing the electrodes with a voltage. Adjusting the voltage applied to each of the electrodes makes it possible to detect, upon deflecting, the secondary particles, and to control the range of azimuth angles of the secondary particles to be detected.
Inventors:
KISHIMOTO TAKANORI (JP)
TACHIBANA ICHIRO (JP)
SUZUKI NAOMASA (JP)
TACHIBANA ICHIRO (JP)
SUZUKI NAOMASA (JP)
Application Number:
PCT/JP2015/069372
Publication Date:
January 12, 2017
Filing Date:
July 06, 2015
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/244; H01J37/22
Foreign References:
| JPS58148867U | 1983-10-06 | |||
| JPS599843A | 1984-01-19 | |||
| JP2014225354A | 2014-12-04 | |||
| JP2012023398A | 2012-02-02 | |||
| JP2012186177A | 2012-09-27 |
Attorney, Agent or Firm:
INOUE Manabu et al. (JP)
Download PDF: