Title:
CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/090129
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a charged particle beam device capable of continuous stable operation with low noise and high efficiency. In the charged particle beam device, a high-voltage power source (103) and a charged particle gun (114) containing a charged particle source are connected through a high-voltage cable (106). The charged particle beam device comprises: a power-receiving coil of a power-send-receive device (124) installed in a hollow portion of the high-voltage cable (106) and supplying the power used in the charged particle gun (114); and a power-sending coil of the power-send-receive device (124) installed on the outer side of the high-voltage cable (106) and sending power. The power is transmitted by magnetic field resonance coupling between the power-sending coil and the power-receiving coil.
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Inventors:
KAWASAKI TAKESHI (JP)
Application Number:
PCT/JP2015/083085
Publication Date:
June 01, 2017
Filing Date:
November 25, 2015
Export Citation:
Assignee:
HITACHI LTD (JP)
International Classes:
H01J37/248; H02J50/00
Foreign References:
JPH11273611A | 1999-10-08 | |||
JP2012182985A | 2012-09-20 | |||
JP2014127296A | 2014-07-07 | |||
JPS6378440A | 1988-04-08 | |||
JP2012110085A | 2012-06-07 | |||
JP2011211779A | 2011-10-20 |
Attorney, Agent or Firm:
POLAIRE I.P.C. (JP)
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