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Patent Searching and Data


Title:
CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/187548
Kind Code:
A1
Abstract:
In order to provide a charged particle beam device capable of superficial and internal low-damage observation and evaluation of a sample, this charged particle beam device comprises: a charged particle beam source (102); a sample stage (109) for carrying a sample (210); charged particle beam optics whereby a charged particle beam (100) is pulsed and irradiated onto the sample at an acceleration voltage within a range of 0 kV exclusive to 5 kV inclusive; a split distance selection unit (125) for selecting a measurement target on the sample; and a split distance setting unit (124) for setting a split distance L to be used during one line scanning of the charged particle beam (100) over the sample (210).

Inventors:
TSUNO NATSUKI (JP)
SUZUKI NAOMASA (JP)
OKITA ATSUSHI (JP)
FUKUDA MUNEYUKI (JP)
Application Number:
PCT/JP2016/063177
Publication Date:
November 02, 2017
Filing Date:
April 27, 2016
Export Citation:
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Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
G01N23/225; H01J37/28
Foreign References:
JP2012252913A2012-12-20
JPH0417248A1992-01-22
Attorney, Agent or Firm:
POLAIRE I.P.C. (JP)
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