Title:
CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/203676
Kind Code:
A1
Abstract:
In order to provide a charged particle beam device that is capable of adequately cooling a low-heat-conductivity material having a hollow structure, etc., a charged particle beam device is provided with: a charged particle source (101); a sample (107) that includes an ion liquid, the sample comprising the low-heat-conductivity material having a hollow structure, etc.; and a shielding plate (108) disposed on the sample (107) so that a part of the sample (107) is exposed when viewed from the charged particle source (101).
Inventors:
KANEKO ASAKO (JP)
NOMAGUCHI CHIHIRO (JP)
TAKASU HISAYUKI (JP)
NOMAGUCHI CHIHIRO (JP)
TAKASU HISAYUKI (JP)
Application Number:
PCT/JP2016/065672
Publication Date:
November 30, 2017
Filing Date:
May 27, 2016
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/20; H01J37/30
Domestic Patent References:
| WO2014199737A1 | 2014-12-18 | |||
| WO2007083756A1 | 2007-07-26 | |||
| WO2014119351A1 | 2014-08-07 |
Foreign References:
| JP2011124162A | 2011-06-23 |
Attorney, Agent or Firm:
POLAIRE I.P.C. (JP)
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