Title:
CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/003493
Kind Code:
A1
Abstract:
The objective of the present invention is to provide a charged particle beam device capable of correcting an image drift, which accompanies stage deformation or the like, during imaging immediately after moving a stage. In order to achieve the objective, this charged particle beam device comprises: a sample chamber; a sample stage disposed inside the sample chamber; a charged particle beam source emitting a charged particle beam; a deflector whereby the charged particle beam emitted from the charged particle beam source is deflected; a focusing lens focusing the charged particle beam; and a control device controlling the sample stage and the deflector, the control device calculating the deflection signal to be supplied to the deflector on the basis of the thrust information when driving the sample stage and coefficients assigned at each position on the sample stage.
Inventors:
KATO TAKANORI (JP)
TAKAHASHI MOTOHIRO (JP)
NAKAGAWA SHUICHI (JP)
OGAWA HIRONORI (JP)
TAKAHASHI MOTOHIRO (JP)
NAKAGAWA SHUICHI (JP)
OGAWA HIRONORI (JP)
Application Number:
PCT/JP2017/021905
Publication Date:
January 04, 2018
Filing Date:
June 14, 2017
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/147; H01J37/20; H01J37/22; H01J37/28
Foreign References:
| JPS5963649A | 1984-04-11 | |||
| JP2014093153A | 2014-05-19 | |||
| JP2015046331A | 2015-03-12 | |||
| JP2015026553A | 2015-02-05 |
Attorney, Agent or Firm:
TODA Yuji (JP)
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