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Title:
CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/020624
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a charged particle beam device for detecting, with highly precise angular discrimination, charged particles emitted from a specimen. To achieve this purpose, proposed is a charged particle beam device provided with a scanning deflector for scanning on a specimen charged particle beams emitted from a charged particle source, the charged particle beam device being provided with: a first detector (9) for detecting charged particles obtained by scanning of the charged particle beams on a specimen (6), and a second detector (8) placed between the first detector and the specimen, and supported so as to be able to move in the charged particle beam light axis direction.

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Inventors:
KAMEDA TOSHIMASA (JP)
OHTA HIROYA (JP)
TANIMOTO KENJI (JP)
Application Number:
PCT/JP2016/072101
Publication Date:
February 01, 2018
Filing Date:
July 28, 2016
Export Citation:
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Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/244; H01J37/28
Foreign References:
JP2006147430A2006-06-08
JP2009181922A2009-08-13
JPH09320504A1997-12-12
JPH09190793A1997-07-22
JPH11273608A1999-10-08
JP2016139513A2016-08-04
Attorney, Agent or Firm:
TODA Yuji (JP)
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