Title:
CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/154638
Kind Code:
A1
Abstract:
This charged particle beam device is provided with: a charged particle beam source that emits a primary charged particle beam; an objective lens that focuses the primary charged particle beam on a sample; a path electrode, which is disposed between the charged particle beam source and a leading end of the objective lens, and which comprises a metal member; a detector that detects secondary charged particles emitted from the sample; and a static electric field electrode electrically insulated from the path electrode. The path electrode is formed such that the primary charged particle beam passes through the inner side of the path electrode, and the static electric field electrode is formed so as to cover the outer periphery of the path electrode.
Inventors:
SATO RYUJU (JP)
AGEMURA TOSHIHIDE (JP)
NOMAGUCHI TSUNENORI (JP)
AGEMURA TOSHIHIDE (JP)
NOMAGUCHI TSUNENORI (JP)
Application Number:
PCT/JP2017/006449
Publication Date:
August 30, 2018
Filing Date:
February 22, 2017
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/244; H01J37/05; H01J37/28
Foreign References:
| US20090200463A1 | 2009-08-13 | |||
| JP2014209482A | 2014-11-06 | |||
| JP2001357808A | 2001-12-26 | |||
| JPH04190549A | 1992-07-08 |
Attorney, Agent or Firm:
TODA Yuji (JP)
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