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Patent Searching and Data


Title:
CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/163240
Kind Code:
A1
Abstract:
A charged particle beam device provided with: a deflection part for deflecting a charged particle beam released from a charged particle source and irradiating a sample with the charged particle beam; a reflection plate for reflecting secondary electrodes generated from the sample; and a control unit for controlling the deflection part on the basis of an image produced by detecting the secondary electrons reflected by the reflection plate. The deflection part has an electromagnetic deflection part for electromagnetically scanning the charged particle beam by a magnetic field, and an electrostatic deflection part for electrostatically scanning the charged particle beam by an electric field. The control unit controls the electromagnetic deflection part and the electrostatic deflection part, superimposes an electromagnetic deflection vector generated by the electromagnetic scanning and an electrostatic deflection vector generated by the electrostatic scanning, and controls at least the trajectory of the charged particle beam.

Inventors:
IKEDA Kazuki (6-6, Marunouchi 1-chome, Chiyoda-k, Tokyo 80, 〒1008280, JP)
LI Wen (6-6, Marunouchi 1-chome, Chiyoda-k, Tokyo 80, 〒1008280, JP)
NISHIMOTO Takuma (6-6, Marunouchi 1-chome, Chiyoda-k, Tokyo 80, 〒1008280, JP)
TAKAHASHI Hiroyuki (24-14 Nishi Shimbashi 1-chome, Minato-k, Tokyo 17, 〒1058717, JP)
MORI Wataru (24-14 Nishi Shimbashi 1-chome, Minato-k, Tokyo 17, 〒1058717, JP)
SUZUKI Makoto (24-14 Nishi Shimbashi 1-chome, Minato-k, Tokyo 17, 〒1058717, JP)
KAWANO Hajime (24-14 Nishi Shimbashi 1-chome, Minato-k, Tokyo 17, 〒1058717, JP)
Application Number:
JP2017/008755
Publication Date:
September 13, 2018
Filing Date:
March 06, 2017
Export Citation:
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Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
International Classes:
H01J37/147; H01J37/22; H01J37/28
Foreign References:
JPH09171791A1997-06-30
JP2009272232A2009-11-19
JP2014143096A2014-08-07
JPS53131755A1978-11-16
Attorney, Agent or Firm:
SEIRYO I.P.C. (24-2, Hatchobori 2-chome Chuo-k, Tokyo 32, 〒1040032, JP)
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