CHARGED PARTICLE BEAM DEVICE

WIPO Patent Application WO/2018/220809

A1

The present invention makes it possible to detect high-energy signal electrons that pass through the vicinity of an optical axis, e.g., backscattered electrons (BSE) or secondary electrons (SE) in a booster optical system. For this purpose, provided is a charged particle beam device having a charged particle beam source 101 for generating a charged particle beam, an objective lens 105 for focusing the charged particle beam onto a sample, and a charged particle detection element 108 that is disposed between the charged particle beam source 101 and the objective lens 105 and detects charged particles produced due to the interaction between the charged particle beam and the sample, wherein the detection surface of the charged particle detection element 108 is disposed on the center axis of the objective lens 105.

WO/2021/177125	OBSERVATION TARGET GAS TRANSMISSION/DIFFUSION PATH OBSERVATION DEVICE, OBSERVATION TARGET GAS MEASUREMENT METHOD, SPOT-DEFECT LOCATION DETECTION DEVICE, SPOT-DEFECT LOCATION DETECTION METHOD, AND OBSERVATION SAMPLE
JP2004319233	ELECTRON MICROSCOPE
WO/2018/225563	RADIATION DETECTOR AND RADIATION DETECTION DEVICE

NOMAGUCHI TSUNENORI (JP)
MOTOMURA SHUNICHI (JP)
NISHINAKA KENICHI (JP)
AGEMURA TOSHIHIDE (JP)

PCT/JP2017/020555

December 06, 2018

June 02, 2017

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HITACHI HIGH TECH CORP (JP)

H01J37/244; H01J37/09

WO2016092642A1	2016-06-16
WO2002001596A1	2002-01-03

JP2000030654A

2000-01-28

POLAIRE I.P.C. (JP)

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