Title:
CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/225148
Kind Code:
A1
Abstract:
The device comprises a scanning coil for causing a charged particle beam emitted from a charged particle source to scan over a sample, a scan control unit for controlling the scanning coil, a detector for detecting electrons generated from the sample scanned with the charged particle beam, and an imaging unit for generating an image from the output signal of the detector. The imaging unit has an image offset amount calculation unit for determining the image offset amount for each image acquired in each scanning direction. The scan control unit has a scanning coordinate generation unit for generating scanning coordinates corrected for each of the scanning directions on the basis of the image offset amounts, and a scanning signal generation unit with which the corrected scanning coordinates are converted into a scanning signal, which is fed to the scanning coil so as to control the scanning position of the charged particle beam.
Inventors:
NAGASHIMA TOMOHARU (JP)
SAKURAI YUICHI (JP)
KANAI HISAAKI (JP)
IKEDA KAZUKI (JP)
WADA MASASHI (JP)
HOQUE SHAHEDUL (JP)
SAKURAI YUICHI (JP)
KANAI HISAAKI (JP)
IKEDA KAZUKI (JP)
WADA MASASHI (JP)
HOQUE SHAHEDUL (JP)
Application Number:
PCT/JP2017/020948
Publication Date:
December 13, 2018
Filing Date:
June 06, 2017
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/147; H01J37/22
Domestic Patent References:
| WO2017056171A1 | 2017-04-06 |
Attorney, Agent or Firm:
SEIRYO I.P.C. (JP)
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