Title:
CHARGED-PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/021454
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a charged-particle beam device capable of stable performance of processes such as a measurement or test, independent of fluctuations in sample electric potential or the like. To this end, this charged-particle beam device comprises an energy filter for filtering the energy of charged particles released from the sample and a deflector for deflecting the charged particles released from the sample toward the energy filter. A control device generates a first image on the basis of the output of a detector, adjusts the voltage applied to the energy filter so that the first image reaches a prescribed state, and calculates deflection conditions for the deflector on the basis of the post-adjustment voltage applied to the energy filter.
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Inventors:
MIZUHARA YUZURU (JP)
KUROSAWA KOUICHI (JP)
KUROSAWA KOUICHI (JP)
Application Number:
PCT/JP2017/027413
Publication Date:
January 31, 2019
Filing Date:
July 28, 2017
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/244; H01J37/05; H01J37/22
Domestic Patent References:
| WO2012172720A1 | 2012-12-20 |
Foreign References:
| JP2014146526A | 2014-08-14 | |||
| JPS61156627A | 1986-07-16 |
Attorney, Agent or Firm:
IWASAKI Shigemi (JP)
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