Title:
CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/043945
Kind Code:
A1
Abstract:
The present invention achieves, with a simple configuration, a complex charged particle beam device that can reduce leakage magnet-field from a magnetic pole piece constituting an objective lens of a SEM. This charged particle beam device: acquires an ion-beam observation image while causing current to flow in a first coil constituting the objective lens; executes, for a plurality of current values, operations for reducing image displacement of the ion-beam image by causing current to flow in a second coil; and determines the current to be caused to flow in the second coil based on differences between the operations.
Inventors:
HIRANO RYO (JP)
NOMAGUCHI TSUNENORI (JP)
KAMIYA CHISATO (JP)
KATANE JUNICHI (JP)
NOMAGUCHI TSUNENORI (JP)
KAMIYA CHISATO (JP)
KATANE JUNICHI (JP)
Application Number:
PCT/JP2017/031788
Publication Date:
March 07, 2019
Filing Date:
September 04, 2017
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/141; H01J37/317
Foreign References:
| JP2010278004A | 2010-12-09 | |||
| JPH05225936A | 1993-09-03 | |||
| JP2009517816A | 2009-04-30 |
Attorney, Agent or Firm:
HIRAKI & ASSOCIATES (JP)
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