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Title:
CHARGED-PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/186937
Kind Code:
A1
Abstract:
The invention addresses the problem that, although a spherical surface aberration correction device wherein a circular hole electrode and a ring electrode have been combined is known as a device for correcting a positive spherical aberration of an electromagnetic lens for use in a charged-particle beam, when a voltage is applied between the circular hole electrode and the ring electrode in such a spherical surface aberration correction device, the focus of the charged-particle beam device varies due to a convex lens effect arising at the circular hole electrode. Therefore, in the charged-particle beam device of the present invention, comprising a charged-particle beam source (101) generating the charged-particle beam, a ring-shaped charged-particle beam aperture (120), and a charged-particle beam aperture power source (108) applying a voltage to the charged-particle beam aperture, the charged-particle beam aperture power source is constituted in such a manner as to apply to the charged-particle beam aperture a voltage yielding a polarity that is opposite to the charge of the charged-particle beam.

Inventors:
NOMAGUCHI Tsunenori (24-14 Nishi Shimbashi 1-chome, Minato-k, Tokyo 17, 〒1058717, JP)
MOTOMURA Shunichi (24-14 Nishi Shimbashi 1-chome, Minato-k, Tokyo 17, 〒1058717, JP)
KAWASAKI Tadahiro (4-1 Mutsuno 2-chome Atsuta-ku, Nagoya-sh, Aichi 87, 〒4568587, JP)
YOSHIDA Ryuji (4-1 Mutsuno 2-chome Atsuta-ku, Nagoya-sh, Aichi 87, 〒4568587, JP)
Application Number:
JP2018/013397
Publication Date:
October 03, 2019
Filing Date:
March 29, 2018
Export Citation:
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Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
JAPAN FINE CERAMICS CENTER (4-1 Mutsuno 2-chome, Atsuta-ku Nagoya-shi Aichi, 87, 〒4568587, JP)
International Classes:
H01J37/09
Domestic Patent References:
WO2016174891A12016-11-03
Foreign References:
JP2012227160A2012-11-15
JPH04248236A1992-09-03
JP2005303165A2005-10-27
Attorney, Agent or Firm:
POLAIRE I.P.C. (13-11, Nihonbashikayabacho 2-chome Chuo-k, Tokyo 25, 〒1030025, JP)
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