Title:
CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/186976
Kind Code:
A1
Abstract:
Provided is a charged particle beam device which calculates a particle concentration, in particular an asbestos concentration, with high accuracy. This charged particle beam device 10 comprises an electron microscope 11 and a control unit 13. The electron microscope 11 irradiates a sample 51 with an electron beam 50 and captures a microscopic image. The control unit 13 distinguishes particles detected from the microscopic image captured by the electron microscope 11 and calculates a particle concentration of the distinguished particles. The control unit comprises an image acquisition unit 32 and a determination unit 33. The image acquisition unit 32 acquires the microscopic image captured by the electron microscope 11. The determination unit 33 determines whether or not detection target particles are present in the microscopic image acquired by the image acquisition unit 32, and, upon determining detection target particles are present, counts the number of the detection target particles and calculates a particle concentration from the counted number of particles.
Inventors:
MISE HIROMI (JP)
YAGUCHI TOSHIE (JP)
YAGUCHI TOSHIE (JP)
Application Number:
PCT/JP2018/013478
Publication Date:
October 03, 2019
Filing Date:
March 29, 2018
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
G01N15/06
Foreign References:
| JP2005233658A | 2005-09-02 | |||
| JP2011040073A | 2011-02-24 | |||
| JP2010117175A | 2010-05-27 | |||
| JP2006228748A | 2006-08-31 | |||
| JP2006127805A | 2006-05-18 |
Other References:
STOTT, W.R. ET AL.: "Sem-Based Automated Fiber Counting", PROCEEDINGS OF THE ... ANNUAL CONFERENCE OF THE MICROBEAM ANALYSIS SOCIETY, vol. 16, 13 July 1981 (1981-07-13), pages 53 - 56, XP009522686
KOHYAMA, NORIHIKO: "Asbestos Measurements: the current state and problems to be solved", JOURNAL OF ENVIRONMENTAL CONSERVATION ENGINEERING, vol. 35, no. 5, October 2006 (2006-10-01), pages 330 - 337, XP055727161
See also references of EP 3779403A4
KOHYAMA, NORIHIKO: "Asbestos Measurements: the current state and problems to be solved", JOURNAL OF ENVIRONMENTAL CONSERVATION ENGINEERING, vol. 35, no. 5, October 2006 (2006-10-01), pages 330 - 337, XP055727161
See also references of EP 3779403A4
Attorney, Agent or Firm:
TSUTSUI & ASSOCIATES (JP)
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