Title:
CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/044553
Kind Code:
A1
Abstract:
This charged particle beam device 100 comprises: an irradiation unit 110 that irradiates a sample S with a charged particle beam; a detection unit 130 that outputs a signal caused by the irradiation of the sample S with the charged particle beam; a display unit 154 that outputs a condition selection interface for selecting one condition set from a plurality of condition sets; and a control unit 151 that executes the evaluation of an object of interest. The condition set includes: information that specifies one learned model from a plurality of learned models; information that specifies one search condition from a plurality of search conditions including at least one among an irradiation condition and a detection condition; and information that specifies one analysis condition from a plurality of analysis conditions that regulate the operation of at least one among the irradiation unit 110 and the detection unit 130. The charged particle beam device 100: receives the selection of the condition set via the condition selection interface; irradiates a first region of the sample S with the charged particle beam on the basis of the specified search condition to detect a first signal caused by the irradiation; delivers information based on the first signal to the specified learned model; acquires, from the specified learned model, information representing a second region, of the sample S, including the position of a candidate of the object of interest, the second region being a part of the first region and being smaller than the first region; irradiates the second region with the charged particle beam on the basis of the specified analysis condition to detect a second signal caused by the irradiation; and inputs information based on the second signal to the control unit 151.
Inventors:
KOMATSUZAKI RYO (JP)
CHIBA HIROYUKI (JP)
TAN WEI CHEAN (JP)
SATOU HIROFUMI (JP)
CHIBA HIROYUKI (JP)
TAN WEI CHEAN (JP)
SATOU HIROFUMI (JP)
Application Number:
PCT/JP2019/034838
Publication Date:
March 11, 2021
Filing Date:
September 04, 2019
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/22; G01N23/2251; H01J37/252
Foreign References:
| JP2012022904A | 2012-02-02 | |||
| JP2001156135A | 2001-06-08 | |||
| JP2004191187A | 2004-07-08 | |||
| JP2018137275A | 2018-08-30 | |||
| JP2018506168A | 2018-03-01 |
Attorney, Agent or Firm:
HIRAKI & ASSOCIATES (JP)
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