CHARGED PARTICLE BEAM MICROSCOPE - HITACHI HIGH-TECHNOLOGIES CORPORATION

Title:

CHARGED PARTICLE BEAM MICROSCOPE

Document Type and Number:

WIPO Patent Application WO/2011/108402

Kind Code:

A1

Abstract:

Disclosed is a charged particle beam microscope which can obtain information about pattern materials and stereostructure without lowering throughput of pattern dimension measurement. To achieve this, the charged particle beam microscope acquires a plurality of frame images by scanning the field of view of the sample (S304, 305), adds the images together (S307), computes the dimensions of the pattern formed on the sample (308) and at the same time acquires pattern information (314) using components of a frame image, such as a single frame image or subframe image, as a separated image (309, 310).

Inventors:

OKAI Nobuhiro (HITACHI LTD., 280, Higashikoigakubo 1-chome, Kokubunji-sh, Tokyo 01, 〒1858601, JP)
岡井　信裕 (〒01 東京都国分寺市東恋ヶ窪一丁目２８０番地　株式会社日立製作所　中央研究所内 Tokyo, 〒1858601, JP)
SOHDA Yasunari (HITACHI LTD., 280, Higashikoigakubo 1-chome, Kokubunji-sh, Tokyo 01, 〒1858601, JP)

Application Number:

JP2011/053857

Publication Date:

September 09, 2011

Filing Date:

February 22, 2011

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Assignee:

HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
OKAI Nobuhiro (HITACHI LTD., 280, Higashikoigakubo 1-chome, Kokubunji-sh, Tokyo 01, 〒1858601, JP)
岡井　信裕 (〒01 東京都国分寺市東恋ヶ窪一丁目２８０番地　株式会社日立製作所　中央研究所内 Tokyo, 〒1858601, JP)

International Classes:

H01J37/22; G01B15/00

Attorney, Agent or Firm:

POLAIRE I.P.C. (7-1 Hatchobori 2-chome, Chuo-ku Tokyo, 32, 〒1040032, JP)

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