Title:
CHARGED PARTICLE DETECTOR, CHARGED PARTICLE BEAM DEVICE, AND MASS SPECTROMETER
Document Type and Number:
WIPO Patent Application WO/2017/130987
Kind Code:
A1
Abstract:
The objective of the present invention is to provide a charged particle detector and a charged particle beam device with which it is possible to acquire a high luminous output while rapidly eliminating charged particles that are incident to a scintillator. In order to achieve said objective, the present invention proposes: a charged particle detector provided with a light-emitting unit (1) including a laminated structure obtained by laminating a GaInN-containing layer (21) and a GaN layer (22), and provided with a conductive layer (2) that is in contact with the GaInN-containing layer on the charged particle incidence surface side of the laminated structure; and a charged particle beam device.
Inventors:
IMAMURA SHIN (JP)
OHSHIMA TAKASHI (JP)
TSUCHIYA TOMONOBU (JP)
KAWANO HAJIME (JP)
SUZUKI MAKOTO (JP)
OHSHIMA TAKASHI (JP)
TSUCHIYA TOMONOBU (JP)
KAWANO HAJIME (JP)
SUZUKI MAKOTO (JP)
Application Number:
PCT/JP2017/002413
Publication Date:
August 03, 2017
Filing Date:
January 25, 2017
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/244; G01T1/202
Foreign References:
| JP2005298603A | 2005-10-27 | |||
| JP2014032029A | 2014-02-20 | |||
| JP2009080124A | 2009-04-16 |
Attorney, Agent or Firm:
TODA Yuji (JP)
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