Title:
CHARGED PARTICLE DETECTORS
Document Type and Number:
WIPO Patent Application WO/2011/005469
Kind Code:
A3
Abstract:
Disclosed are devices, systems, and methods are disclosed that include: (a) a first material layer (110) positioned on a first surface of a support structure (108) and configured to generate secondary electrons in response to incident charged particles (104) that strike the first layer, the first layer including an aperture (112) configured to permit a portion of the incident charged particles to pass through the aperture; and (b) a second material layer (114) positioned on a second surface of the support structure and separated from the first layer, e.g. by a distance of 0.5 cm or more, the second layer being configured to generate secondary electrons in response to charged particles that pass through the aperture and strike the second layer, where the device is a charged particle detector.
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Inventors:
HILL RAYMOND (US)
NOTTE IV JOHN A (US)
MCVEY SHAWN (US)
NOTTE IV JOHN A (US)
MCVEY SHAWN (US)
Application Number:
PCT/US2010/039304
Publication Date:
March 10, 2011
Filing Date:
June 21, 2010
Export Citation:
Assignee:
ZEISS CARL NTS LLC (US)
HILL RAYMOND (US)
NOTTE IV JOHN A (US)
MCVEY SHAWN (US)
HILL RAYMOND (US)
NOTTE IV JOHN A (US)
MCVEY SHAWN (US)
International Classes:
H01J37/244; H01J1/32; H01J37/26; H01J43/06
Foreign References:
| US20040227070A1 | 2004-11-18 | |||
| US4588891A | 1986-05-13 | |||
| US20040238752A1 | 2004-12-02 | |||
| US20040262533A1 | 2004-12-30 | |||
| JPH06139988A | 1994-05-20 | |||
| US20060163478A1 | 2006-07-27 | |||
| EP1271603A1 | 2003-01-02 | |||
| US20030141450A1 | 2003-07-31 | |||
| US20040262531A1 | 2004-12-30 |
Attorney, Agent or Firm:
DALEY, Sean P. (P.O. Box 1022Minneapolis, Minnesota, US)
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