Title:
CHARGED PARTICLE DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/158739
Kind Code:
A1
Abstract:
Provided is a charged particle device that prevents the influence of vibrations without narrowing the movement range of a specimen stage and can control the mutual displacement of a charged particle generation unit and the specimen stage. The charged particle device (1) has a cylindrical column (2) on the upper side and has a specimen chamber (3) with a hollow interior at the lower end of the column (2). The specimen chamber (3) is divided into an upper unit (3a) that has greater vertical vibration than horizontal vibration and a lower unit (3b) that has greater horizontal vibration. The column (2) is provided with a charged particle gun and specimen detection system. Specimen stage support bodies (4) that support the column (1) and a specimen stage (5) are both supported by the upper part (3a) of the specimen chamber and the central axis of the column (1) and the central axis of the specimen stage support bodies (4) are configured in such a manner that they coincide or are parallel. Even if the column (2) or the specimen chamber (3) is subjected to ambient sound, the column (2) and the specimen stage (5) are both fixed to the upper part (3a) of the specimen chamber and vibrate in unison with each other, so mutual displacement between the charged particle generator and the specimen is less likely to occur.
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Inventors:
ENOMOTO Hirohisa (HITACHI LTD., 832-2, Horiguchi, Hitachinaka-sh, Ibaraki 34, 〒3120034, JP)
榎本 裕久 (〒34 茨城県ひたちなか市堀口８３２番地２ 株式会社日立製作所 機械研究所内 Ibaraki, 〒3120034, JP)
SUZUKI Wataru (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
榎本 裕久 (〒34 茨城県ひたちなか市堀口８３２番地２ 株式会社日立製作所 機械研究所内 Ibaraki, 〒3120034, JP)
SUZUKI Wataru (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
Application Number:
JP2011/063310
Publication Date:
December 22, 2011
Filing Date:
June 10, 2011
Export Citation:
Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
ENOMOTO Hirohisa (HITACHI LTD., 832-2, Horiguchi, Hitachinaka-sh, Ibaraki 34, 〒3120034, JP)
榎本 裕久 (〒34 茨城県ひたちなか市堀口８３２番地２ 株式会社日立製作所 機械研究所内 Ibaraki, 〒3120034, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
ENOMOTO Hirohisa (HITACHI LTD., 832-2, Horiguchi, Hitachinaka-sh, Ibaraki 34, 〒3120034, JP)
榎本 裕久 (〒34 茨城県ひたちなか市堀口８３２番地２ 株式会社日立製作所 機械研究所内 Ibaraki, 〒3120034, JP)
International Classes:
H01J37/20; H01J37/16
Attorney, Agent or Firm:
KASUGA Yuzuru (Torii-nihonbashi Bldg, 4-1 Nihonbashi-honcho 3-chome, Chuo-k, Tokyo 23, 〒1030023, JP)
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Claims:
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