CHARGED PARTICLE DEVICE - HITACHI HIGH TECH CORP

Title:

CHARGED PARTICLE DEVICE

Document Type and Number:

WIPO Patent Application WO/2011/158739

Kind Code:

A1

Abstract:

Provided is a charged particle device that prevents the influence of vibrations without narrowing the movement range of a specimen stage and can control the mutual displacement of a charged particle generation unit and the specimen stage. The charged particle device (1) has a cylindrical column (2) on the upper side and has a specimen chamber (3) with a hollow interior at the lower end of the column (2). The specimen chamber (3) is divided into an upper unit (3a) that has greater vertical vibration than horizontal vibration and a lower unit (3b) that has greater horizontal vibration. The column (2) is provided with a charged particle gun and specimen detection system. Specimen stage support bodies (4) that support the column (1) and a specimen stage (5) are both supported by the upper part (3a) of the specimen chamber and the central axis of the column (1) and the central axis of the specimen stage support bodies (4) are configured in such a manner that they coincide or are parallel. Even if the column (2) or the specimen chamber (3) is subjected to ambient sound, the column (2) and the specimen stage (5) are both fixed to the upper part (3a) of the specimen chamber and vibrate in unison with each other, so mutual displacement between the charged particle generator and the specimen is less likely to occur.

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Inventors:

ENOMOTO HIROHISA (JP)
SUZUKI WATARU (JP)
KITAYAMA SHINYA (JP)

Application Number:

PCT/JP2011/063310

Publication Date:

December 22, 2011

Filing Date:

June 10, 2011

Export Citation:

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Assignee:

HITACHI HIGH TECH CORP (JP)
ENOMOTO HIROHISA (JP)
SUZUKI WATARU (JP)
KITAYAMA SHINYA (JP)

International Classes:

H01J37/20; H01J37/16

Foreign References:

JPH0817383A	1996-01-19
JPH09236755A	1997-09-09
JP2009079728A	2009-04-16
JP2009050876A	2009-03-12
JPH06288432A	1994-10-11
JPH03269940A	1991-12-02
JP2005217303A	2005-08-11
JP2010123354A	2010-06-03
JP2007207673A	2007-08-16

Other References:

None

Attorney, Agent or Firm:

KASUGA Yuzuru (JP)
Kasuga 讓 (JP)

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Claims:

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