Title:
CHARGED PARTICLE EXTRACTION DEVICE AND METHOD OF DESIGN THERE FOR
Document Type and Number:
WIPO Patent Application WO2005038821
Kind Code:
A3
Abstract:
The present invention provides a method for extracting a charged particle beam (18) from a charged particle source (14). A set of electrodes (200, 202, 204, 206) is provided at the output of the source. The potentials applied to the electrodes produce a low- emittance growth beam with substantially zero electric field at the output of the electrodes.
Inventors:
BOSWELL RODERICK (AU)
SUTHERLAND ORSON (AU)
SUTHERLAND ORSON (AU)
Application Number:
PCT/US2004/034984
Publication Date:
December 07, 2006
Filing Date:
October 16, 2004
Export Citation:
Assignee:
FEI CO (US)
UNIV AUSTRALIAN (AU)
BOSWELL RODERICK (AU)
SUTHERLAND ORSON (AU)
UNIV AUSTRALIAN (AU)
BOSWELL RODERICK (AU)
SUTHERLAND ORSON (AU)
International Classes:
H05H1/24; H01J37/08; G21K
Foreign References:
| US4503329A | 1985-03-05 | |||
| US5614711A | 1997-03-25 | |||
| US5686796A | 1997-11-11 |
Other References:
See also references of EP 1683163A4
Download PDF:
Previous Patent: METHOD FOR DRYING SPENT FUEL ASSEMBLIES
Next Patent: PLASMA SOURCE OF DIRECTED BEAMS AND APPLICATION THEREOF TO MICROLITHOGRAPHY
Next Patent: PLASMA SOURCE OF DIRECTED BEAMS AND APPLICATION THEREOF TO MICROLITHOGRAPHY