Title:
CHARGED PARTICLE MICROSCOPE AND ION MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2011/096227
Kind Code:
A1
Abstract:
In order to provide a safe and environmentally-friendly charged gas particle microscope that exhibits a superior ionized gas-utilization efficiency and economic efficiency, the gas field ionization ion source of a charged particle microscope is equipped with a vacuum chamber in which are provided a vacuum chamber evacuation mechanism, an acicular emitter tip, an extraction electrode disposed facing the emitter tip, and a mechanism for supplying a gas to the vicinity of the emitter tip, and is configured so that the gas in the region around the tip of the acicular ion emitter is ionized and extracted as an ion beam. Therein, the evacuation mechanism and the gas supply mechanism are connected, and a material for adhering the gas to be ionized is disposed between the evacuation mechanism and the gas supply mechanism.
Inventors:
SHICHI, Hiroyasu (HITACHI LTD., 280, Higashikoigakubo 1-chome, Kokubunji-sh, Tokyo 01, 〒1858601, JP)
志知 広康 (〒01 東京都国分寺市東恋ヶ窪一丁目２８０番地 株式会社日立製作所 中央研究所内 Tokyo, 〒1858601, JP)
MATSUBARA, Shinichi (HITACHI LTD., 280, Higashikoigakubo 1-chome, Kokubunji-sh, Tokyo 01, 〒1858601, JP)
松原 信一 (〒01 東京都国分寺市東恋ヶ窪一丁目２８０番地 株式会社日立製作所 中央研究所内 Tokyo, 〒1858601, JP)
志知 広康 (〒01 東京都国分寺市東恋ヶ窪一丁目２８０番地 株式会社日立製作所 中央研究所内 Tokyo, 〒1858601, JP)
MATSUBARA, Shinichi (HITACHI LTD., 280, Higashikoigakubo 1-chome, Kokubunji-sh, Tokyo 01, 〒1858601, JP)
松原 信一 (〒01 東京都国分寺市東恋ヶ窪一丁目２８０番地 株式会社日立製作所 中央研究所内 Tokyo, 〒1858601, JP)
Application Number:
JP2011/000629
Publication Date:
August 11, 2011
Filing Date:
February 04, 2011
Export Citation:
Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishishimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
SHICHI, Hiroyasu (HITACHI LTD., 280, Higashikoigakubo 1-chome, Kokubunji-sh, Tokyo 01, 〒1858601, JP)
志知 広康 (〒01 東京都国分寺市東恋ヶ窪一丁目２８０番地 株式会社日立製作所 中央研究所内 Tokyo, 〒1858601, JP)
MATSUBARA, Shinichi (HITACHI LTD., 280, Higashikoigakubo 1-chome, Kokubunji-sh, Tokyo 01, 〒1858601, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
SHICHI, Hiroyasu (HITACHI LTD., 280, Higashikoigakubo 1-chome, Kokubunji-sh, Tokyo 01, 〒1858601, JP)
志知 広康 (〒01 東京都国分寺市東恋ヶ窪一丁目２８０番地 株式会社日立製作所 中央研究所内 Tokyo, 〒1858601, JP)
MATSUBARA, Shinichi (HITACHI LTD., 280, Higashikoigakubo 1-chome, Kokubunji-sh, Tokyo 01, 〒1858601, JP)
International Classes:
H01J27/26; H01J37/08; H01J37/16; H01J37/18; H01J37/317
Attorney, Agent or Firm:
INOUE, Manabu et al. (6-1, Marunouchi 1-chome, Chiyoda-k, Tokyo 20, 〒1008220, JP)
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