Title:
CHARGED PARTICLE MICROSCOPY MEMS SAMPLE SUPPORT
Document Type and Number:
WIPO Patent Application WO/2022/122985
Kind Code:
A3
Abstract:
The present invention relates to a sample support device for charged particle microscopy and related methods. The device comprises a substrate (110) and a heating (101) and/or biasing element integrated in or on the substrate to heat (or apply a bias voltage to) a sample when positioned in an observation region (102) of the device. The device comprises a membrane (103) covering an opening in the heater element and/or substrate in the observation region (102) of the device. The membrane is perforated to form at least one hole (105) covered by a graphene layer (104) to form a sample support to place a sample of interest thereon for study. A cap (121) covers the membrane such that a chamber (120) is formed in which the sample can be isolated in a controllable gaseous environment.
Inventors:
PEDRAZO TARDAJOS ADRIAN (BE)
BALS SARA (BE)
BALS SARA (BE)
Application Number:
PCT/EP2021/085112
Publication Date:
October 06, 2022
Filing Date:
December 09, 2021
Export Citation:
Assignee:
UNIV ANTWERPEN (BE)
International Classes:
H01J37/20
Domestic Patent References:
| WO2008141147A1 | 2008-11-20 | |||
| WO2020208433A1 | 2020-10-15 |
Foreign References:
| US20160042912A1 | 2016-02-11 | |||
| US20170062177A1 | 2017-03-02 | |||
| US20150118126A1 | 2015-04-30 | |||
| US20200240933A1 | 2020-07-30 |
Other References:
KOLMAKOV ANDREI ET AL: "Recent Approaches for Bridging the Pressure Gap in Photoelectron Microspectroscopy", TOPICS IN CATALYSIS, BALTZER SCIENCE PUBLISHERS, BUSSUM, NL, vol. 59, no. 5, 29 January 2016 (2016-01-29), pages 448 - 468, XP035933581, ISSN: 1022-5528, [retrieved on 20160129], DOI: 10.1007/S11244-015-0519-1
WESTENFELDER B ET AL: "Graphene-based sample supports for in situ high-resolution TEM electrical investigations;Graphene-based sample supports for in situ HRTEM electrical investigations", JOURNAL OF PHYSICS D: APPLIED PHYSICS, INSTITUTE OF PHYSICS PUBLISHING, BRISTOL, GB, vol. 44, no. 5, 17 January 2011 (2011-01-17), pages 55502, XP020203722, ISSN: 0022-3727, DOI: 10.1088/0022-3727/44/5/055502
NORCADA: "A MEMS Technology Company Silicon Nitride TEM Window Grid Specification Frame: Unit Description", 6 February 2017 (2017-02-06), pages 1 - 1, XP055937352, Retrieved from the Internet
WESTENFELDER B ET AL: "Graphene-based sample supports for in situ high-resolution TEM electrical investigations;Graphene-based sample supports for in situ HRTEM electrical investigations", JOURNAL OF PHYSICS D: APPLIED PHYSICS, INSTITUTE OF PHYSICS PUBLISHING, BRISTOL, GB, vol. 44, no. 5, 17 January 2011 (2011-01-17), pages 55502, XP020203722, ISSN: 0022-3727, DOI: 10.1088/0022-3727/44/5/055502
NORCADA: "A MEMS Technology Company Silicon Nitride TEM Window Grid Specification Frame: Unit Description", 6 February 2017 (2017-02-06), pages 1 - 1, XP055937352, Retrieved from the Internet
Attorney, Agent or Firm:
BUREAU MFJ BOCKSTAEL NV et al. (BE)
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