CHARGED PARTICLE RADIATION DEVICE

WIPO Patent Application WO/2010/146790

A1

Disclosed is a high-resolution, high-throughput charged particle radiation device that attenuates, in a short amount of time, the characteristic vibrations of ion pumps, said vibrations being excited by the reaction force when a stage is driven. Said charged particle radiation device also prevents power loops and current loops. The charged particle radiation device is provided with: a sample chamber (4) inside which a sample (3) is disposed; a charged particle radiation optical tube (1) for irradiating the sample (3) with charged particles (10); and ion pumps (2a, 2b) that evacuate the interior of the charged particle radiation optical tube (1). A frame (16) is fixed in the sample chamber (4) facing one end of the ion pumps (2a, 2b), and vibration-absorbing bodies are provided between the frame (16) and the one end of the ion pumps (2a, 2b). Each vibration-absorbing body comprises a layered structure in which a viscoelastic sheet (20a, 20b) is sandwiched between metal plates (18a, 18b, 21a, 21b).

JPH06223762	DEVICE FOR ACCELERATING CHARGED PARTICLE
WO/2023/009287	SHAPED REPELLER FOR AN INDIRECTLY HEATED CATHODE ION SOURCE

TSUJI HIROSHI (JP)
ISHIGURO KOUJI (JP)
TACHIBANA ICHIRO (JP)
SUZUKI NAOMASA (JP)
ONUKI KATSUNORI (JP)

PCT/JP2010/003698

December 23, 2010

June 03, 2010

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HITACHI HIGH TECH CORP (JP)
TSUJI HIROSHI (JP)
ISHIGURO KOUJI (JP)
TACHIBANA ICHIRO (JP)
SUZUKI NAOMASA (JP)
ONUKI KATSUNORI (JP)

H01J37/16; F16F1/40; F16F15/04; H01J37/18

JP2008052947A	2008-03-06
JPH09190791A	1997-07-22
JP2008052946A	2008-03-06
JP2009004112A	2009-01-08
JP2001076660A	2001-03-23
JP2007157682A	2007-06-21

POLAIRE I. P. C. (JP)
Polaire Intellectual Property Corporation (JP)

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