Title:
CHEMICAL COATING APPARATUS USING DOUBLE SLIT NOZZLE
Document Type and Number:
WIPO Patent Application WO/2017/052076
Kind Code:
A1
Abstract:
A chemical coating device comprises: a cleaning solution transfer member positioned on a base plate and capable of transferring a cleaning solution; a cleaning solution injection nozzle installed at a lower portion of the cleaning solution transfer member; a cover member installed at a lower portion and both side portions of the base plate and covering the cleaning solution injection nozzle; and a double slit nozzle connected through a connecting member to the base plate in a front end portion of the cleaning solution transfer member and capable of discharging the cleaning solution and a chemical. The double slit nozzle comprises: a chemical slit nozzle unit having a chemical discharge path guiding the chemical to a slit discharge port and discharging the chemical to the outside; a cleaning solution slit nozzle unit positioned on one side of the chemical slit nozzle unit, having a cleaning solution discharge path guiding the cleaning solution into the slit discharge port, and cleaning the inside of the slit discharge port; and a slit nozzle fastening unit for fastening the chemical slit nozzle unit and the cleaning solution slit nozzle unit.
Inventors:
NAM JIYOUNG (KR)
Application Number:
PCT/KR2016/009062
Publication Date:
March 30, 2017
Filing Date:
August 18, 2016
Export Citation:
Assignee:
NAM JIYOUNG (KR)
International Classes:
B05C11/10; B05C5/02
Foreign References:
| KR20010067387A | 2001-07-12 | |||
| JP2006192360A | 2006-07-27 | |||
| KR101010032B1 | 2011-01-21 | |||
| JP2010087143A | 2010-04-15 | |||
| JP2002192020A | 2002-07-10 |
Attorney, Agent or Firm:
SHIN, Kyoungho (KR)
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