Title:
CHEMICAL SOLUTION PREPARATION SYSTEM, CLEANING DEVICE, AND CLEANING DEVICE SYSTEM
Document Type and Number:
WIPO Patent Application WO/2016/010157
Kind Code:
A1
Abstract:
[Problem] To provide a chemical solution preparation system and a cleaning device which are capable of increasing safety. [Solution] A robot system (1) has a robot (100) that prepares a chemical solution and injects the chemical solution into a container and a cleaning device (700) that cleans, using cleaning liquid, a surface of the container (716) into which the chemical solution has been injected by the robot (100). The cleaning device (700) has a lid unit (702) an opening (703) of which is closed or opened by being attached to or detached from a cleaning chamber (701), and the lid unit (702) is provided with a hook member (708) for hanging the container (716).
Inventors:
MURAKAMI HIROAKI (JP)
NOMURA MASAYUKI (JP)
TASAKA SHIGEJI (JP)
UMENO MAKOTO (JP)
SEKIGUCHI MITSUE (JP)
MURATA KAZUTAKA (JP)
NOMURA MASAYUKI (JP)
TASAKA SHIGEJI (JP)
UMENO MAKOTO (JP)
SEKIGUCHI MITSUE (JP)
MURATA KAZUTAKA (JP)
Application Number:
PCT/JP2015/070632
Publication Date:
January 21, 2016
Filing Date:
July 17, 2015
Export Citation:
Assignee:
YASKAWA DENKI SEISAKUSHO KK (JP)
NIKKA MICRON CO LTD (JP)
NIKKA MICRON CO LTD (JP)
International Classes:
A61J3/00
Foreign References:
| JP2013052250A | 2013-03-21 | |||
| JP2012101028A | 2012-05-31 | |||
| JP2009544391A | 2009-12-17 |
Attorney, Agent or Firm:
MASUDA Hirofumi et al. (JP)
Hirofumi Masuda (JP)
Hirofumi Masuda (JP)
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