Title:
CHEMICAL SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS PROVIDED WITH SAME, AND APPLICATION/DEVELOPMENT SYSTEM PROVIDED WITH THE SUBSTRATE PROCESSING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2011/138881
Kind Code:
A1
Abstract:
Disclosed is a chemical supply system which is provided with: a first container and a second container, which store chemicals; a first pump, which is provided in first piping that connects together the first container and the second container, and which makes the chemical stored in the first container flow to the second container; a first filter, which is provided in the first piping, and which filters the chemical that flows in the first piping toward the second container from the first container; second piping which connects together the first container and the second container; and a second pump, which is provided in the second piping, and which makes the chemical stored in the second container flow to the first container.
Inventors:
FURUSHO Toshinobu (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
古庄 智伸 (〒16 熊本県合志市福原１－１ 東京エレクトロン九州株式会社内 Kumamoto, 〒8611116, JP)
OOKUBO Takahiro (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
大久保 敬弘 (〒16 熊本県合志市福原１－１ 東京エレクトロン九州株式会社内 Kumamoto, 〒8611116, JP)
YOSHIHARA Kousuke (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
古庄 智伸 (〒16 熊本県合志市福原１－１ 東京エレクトロン九州株式会社内 Kumamoto, 〒8611116, JP)
OOKUBO Takahiro (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
大久保 敬弘 (〒16 熊本県合志市福原１－１ 東京エレクトロン九州株式会社内 Kumamoto, 〒8611116, JP)
YOSHIHARA Kousuke (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
Application Number:
JP2011/056255
Publication Date:
November 10, 2011
Filing Date:
March 16, 2011
Export Citation:
Assignee:
TOKYO ELECTRON LIMITED (3-1 Akasaka 5-chome, Minato-ku Tokyo, 25, 〒1076325, JP)
東京エレクトロン株式会社 (〒25 東京都港区赤坂五丁目３番１号 Tokyo, 〒1076325, JP)
FURUSHO Toshinobu (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
古庄 智伸 (〒16 熊本県合志市福原１－１ 東京エレクトロン九州株式会社内 Kumamoto, 〒8611116, JP)
OOKUBO Takahiro (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
大久保 敬弘 (〒16 熊本県合志市福原１－１ 東京エレクトロン九州株式会社内 Kumamoto, 〒8611116, JP)
東京エレクトロン株式会社 (〒25 東京都港区赤坂五丁目３番１号 Tokyo, 〒1076325, JP)
FURUSHO Toshinobu (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
古庄 智伸 (〒16 熊本県合志市福原１－１ 東京エレクトロン九州株式会社内 Kumamoto, 〒8611116, JP)
OOKUBO Takahiro (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
大久保 敬弘 (〒16 熊本県合志市福原１－１ 東京エレクトロン九州株式会社内 Kumamoto, 〒8611116, JP)
International Classes:
H01L21/027; B01D35/26; B05C11/08; B05C11/10; H01L21/304
Attorney, Agent or Firm:
KATSUNUMA Hirohito et al. (Kyowa Patent & Law Office, Room 323 Fuji Bldg., 2-3, Marunouchi 3-chome, Chiyoda-k, Tokyo 05, 〒1000005, JP)
Claims: