Title:
CHEMICAL VAPOR DEPOSITION APPARATUS CAPABLE OF ROTATING AND LIFTING IN RECIPROCATING MANNER
Document Type and Number:
WIPO Patent Application WO/2023/082853
Kind Code:
A1
Abstract:
Provided in the present invention is a chemical vapor deposition apparatus capable of rotating and lifting in a reciprocating manner. The apparatus comprises a cavity, a base, a fixing support, a lifting mechanism and a rotating mechanism. According to the present invention, the apparatus can be sealed by using a magnetic fluid sealing principle, and the rotating and lifting functions are integrated, thereby avoiding mutual influence while cooperative work of reciprocating rotation, lifting movement, wafer heating, etc. can be achieved at the same time, and also avoiding, by means of reciprocating rotation, the problem of physical winding and damage of an electrical wire during a rotating process. In addition, an air blowing device can be arranged in the rotating mechanism, thereby preventing microparticles, which are formed in a cavity, from affecting the magnetic fluid of the rotating mechanism, and ensuring the efficient and stable running of the rotating mechanism. In comparison with an existing apparatus, more transmission assemblies are removed from an overall structure of the chemical vapor deposition apparatus that is capable of rotating and lifting in a reciprocating manner in the present invention, such that the instability and mechanical abrasion caused by more redundant assemblies are reduced, thereby achieving a higher accuracy of lifting and rotating control, a higher stability, and a lower manufacturing cost and power consumption.
Inventors:
JIN XIAOLIANG (CN)
LI ZHONGYUN (CN)
PAN XUEQIN (CN)
SUNG WALEY WEITSUNG (CN)
LI ZHONGYUN (CN)
PAN XUEQIN (CN)
SUNG WALEY WEITSUNG (CN)
Application Number:
PCT/CN2022/120432
Publication Date:
May 19, 2023
Filing Date:
September 22, 2022
Export Citation:
Assignee:
BETONE TECH SUZHOU INC (CN)
International Classes:
C23C16/458
Foreign References:
| CN113774360A | 2021-12-10 | |||
| CN111364026A | 2020-07-03 | |||
| CN102160166A | 2011-08-17 | |||
| CN111705302A | 2020-09-25 |
Attorney, Agent or Firm:
J.Z.M.C. PATENT AND TRADEMARK LAW OFFICE (CN)
Download PDF: