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Patent Searching and Data


Title:
CHIP FOR CAPACITOR MICROPHONE, CAPACITOR MICROPHONE, AND METHOD FOR MANUFACTURING THE SAME
Document Type and Number:
WIPO Patent Application WO/2008/001824
Kind Code:
A1
Abstract:
For the purpose of miniaturizing and supersensitizing a chip for a capacitor microphone formed by micromachining a silicone substrate, the silicone substrate of the chip for the microphone is diced in a generally hexagonal, desirably regular hexagonal shape, and a back air chamber is formed in a circular or regular hexagonal shape.

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Inventors:
TAKEUCHI, Yusuke (())
Application Number:
JP2007/062947
Publication Date:
January 03, 2008
Filing Date:
June 27, 2007
Export Citation:
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Assignee:
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (1006, Oaza Kadoma Kadoma-sh, Osaka 01, 5718501, JP)
松下電器産業株式会社 (〒01 大阪府門真市大字門真1006番地 Osaka, 5718501, JP)
International Classes:
H04R19/04; H01L41/09; H01L41/22; H04R31/00
Foreign References:
JP2006020313A
JP2001231099A
JP2000013894A
JP2006135309A
JPS6193613A
Attorney, Agent or Firm:
TAKAMATSU, Takeshi et al. (Eikoh Patent Office, 7-13Nishi-Shimbashi 1-chome,Minato-k, Tokyo 03, 1050003, JP)
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