Title:
CHIP COUNTER FOR SEMICONDUCTOR CHIP-MOUNTED TAPE REEL
Document Type and Number:
WIPO Patent Application WO/2020/105972
Kind Code:
A1
Abstract:
The present invention relates to a chip counter, which transmits an X-ray beam through a tape reel around which a tape having a plurality of semiconductor chips mounted in a row therein is wound, acquires an image scattered or diffracted by the semiconductor chips, and processes the acquired image, so as to count the number of the semiconductor chips, wherein: the X-ray beam transmitted through the tape reel (1) is sensed by a fluorescent intensifying screen (60); a fluorescent light emitted from the fluorescent intensifying screen (60) according to the sensing of the X-ray beam is captured by a camera (70), so that the number of the semiconductor chips is counted from an image in which the semiconductor chips are displayed by a dotted image; and the camera (70) is protected by an X-ray beam shielding member (100: 110; 120; and 130).
Inventors:
LEE HYUN SU (KR)
Application Number:
PCT/KR2019/015667
Publication Date:
May 28, 2020
Filing Date:
November 15, 2019
Export Citation:
Assignee:
NANODREAM CO LTD (KR)
International Classes:
H01L21/67; G06M1/10
Foreign References:
| KR20180067103A | 2018-06-20 | |||
| JPH09138203A | 1997-05-27 | |||
| KR101451113B1 | 2014-10-16 | |||
| JP2015043174A | 2015-03-05 | |||
| KR20090109657A | 2009-10-21 |
Attorney, Agent or Firm:
STYP PATENT LAW FIRM (KR)
Download PDF: