Title:
CHIP DEFECT DETECTION DEVICE AND DETECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2018/072749
Kind Code:
A1
Abstract:
A chip defect detection device and detection method. The chip defect detection device comprises: a light source member (10), for transmitting a beam having at least two wavelengths; a beam splitter (40), for receiving the beam transmitted by the light source member (10), and splitting the received beam into a first part and a second part, wherein the first part of the beam is reflected by a surface to be detected of the chip (60) to form a detection beam; a reference member (70), for receiving the second part of the beam, and processing the second part of the beam to form a reference beam; a detection member (90), for receiving the detection beam and the reference beam, and forming, based on an included angle between the reference beam and the detection beam, interference lines on a detection surface of the detection member (90), and determining a defect parameter of the surface to be detected of the chip (60) according to the interference lines. The device for detecting chip defects of the present invention enhances detection accuracy and detection efficiency, and is better suited to carrying out detection on larger chip samples.
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Inventors:
ZHANG PENGLI (CN)
LU HAILIANG (CN)
WANG FAN (CN)
LU HAILIANG (CN)
WANG FAN (CN)
Application Number:
PCT/CN2017/107115
Publication Date:
April 26, 2018
Filing Date:
October 20, 2017
Export Citation:
Assignee:
SHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD (CN)
International Classes:
G01N21/95; G01B9/021
Foreign References:
| CN101236067A | 2008-08-06 | |||
| CN101477325A | 2009-07-08 | |||
| CN105159044A | 2015-12-16 | |||
| CN104534979A | 2015-04-22 | |||
| CN103615993A | 2014-03-05 |
Other References:
SERVIN, M. ET AL.: "Synthesis of Multi-Wavelength Temporal Phase-Shifting Algorithms Optimized for High Signal-to-Noise Ratio and High Detuning Robustness Using the Frequency Transfer Function", OPTICS EXPRESS, vol. 24, no. 9, 26 April 2016 (2016-04-26), XP055477910, Retrieved from the Internet
ONODERA, R. ET AL.: "Two-Wavelength Interferometry that Uses a Fourier-Transform Method", APPLIED OPTICS, vol. 37, no. 34, 1 December 1998 (1998-12-01), XP055477911, ISSN: 0003-6935
See also references of EP 3531118A4
ONODERA, R. ET AL.: "Two-Wavelength Interferometry that Uses a Fourier-Transform Method", APPLIED OPTICS, vol. 37, no. 34, 1 December 1998 (1998-12-01), XP055477911, ISSN: 0003-6935
See also references of EP 3531118A4
Attorney, Agent or Firm:
SHANGHAI SAVVY INTELLECTUAL PROPERTY AGENCY (CN)
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