Title:
CHIP PICKUP METHOD AND CHIP PICKUP APPARATUS
Document Type and Number:
WIPO Patent Application WO/2008/047731
Kind Code:
A1
Abstract:
[PROBLEMS] To provide a pickup method and a pickup apparatus wherein pushing
up of a chip is not required and a force for holding a chip which is not picked up is
not varied as pickup progresses. [MEANS FOR SOLVING PROBLEMS] A method is provided
for picking up a chip (13) from a fixed jig (3) to which the chip (13) is fixed. The
fixed jig (3) consists of a jig base (30) having a plurality of protrusions (36)
on one side and a sidewall (35) of substantially the same height as that of the protrusion
(36) at the outer circumference of the one side, and an adhesion layer (31) laminated
on the surface of the jig base (30) having the protrusions (36) and bonded on the
upper surface of the sidewall (35). A section space (37) is formed on the surface
of the jig base (30) having the protrusions by the adhesion layer (31), the protrusions
(36) and the sidewall (35), and at least one through hole (38) penetrating the
outside and the section space (37) is provided in the jig base (30). The pickup
method comprises a step for fixing a chip, a step for deforming the adhesion layer
(31) by sucking air in the section space (37) through the through hole (38), and
a step for picking up the chip (13) completely from the adhesion layer (31) by sucking
the chip (13) from the upper surface side of the chip (13) by means of a suction collet
(70).
Inventors:
WATANABE KENICHI (JP)
SEGAWA TAKESHI (JP)
FUJIMOTO HIRONOBU (JP)
SEGAWA TAKESHI (JP)
FUJIMOTO HIRONOBU (JP)
Application Number:
PCT/JP2007/070009
Publication Date:
April 24, 2008
Filing Date:
October 12, 2007
Export Citation:
Assignee:
LINTEC CORP (JP)
WATANABE KENICHI (JP)
SEGAWA TAKESHI (JP)
FUJIMOTO HIRONOBU (JP)
WATANABE KENICHI (JP)
SEGAWA TAKESHI (JP)
FUJIMOTO HIRONOBU (JP)
International Classes:
H01L21/67; H01L21/301; H01L21/52
Foreign References:
| JP2003229469A | 2003-08-15 | |||
| JP2004311880A | 2004-11-04 | |||
| JP2003179126A | 2003-06-27 | |||
| JP2003088982A | 2003-03-25 |
Other References:
See also references of EP 2080219A4
ELECTRONIC MATERIALS, September 2002 (2002-09-01), pages 17 - 21
ELECTRONIC MATERIALS, September 2002 (2002-09-01), pages 17 - 21
Attorney, Agent or Firm:
SUZUKI, Shunichiro (Gotanda Yamazaki Bldg. 6F13-6, Nishigotanda 7-chom, Shinagawa-ku Tokyo 31, JP)
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