CHLORINE FLUORIDE SUPPLYING METHOD - KANTO DENKA KOGYO KK

Title:

CHLORINE FLUORIDE SUPPLYING METHOD

Document Type and Number:

WIPO Patent Application WO/2017/175644

Kind Code:

A1

Abstract:

Provided are a chlorine fluoride supplying device and a chlorine fluoride supplying method which are capable of stably generating chlorine fluoride (ClF) for industrial use, controlling flow rate thereof, and continuously supplying the same. This chlorine fluoride supplying method is a method for supplying chlorine fluoride that is generated by introducing a gas that includes fluorine atoms and a gas that includes chlorine atoms into a flow type heated reactor or a plasma reactor. In this chlorine fluoride supplying method, it is possible to stably generate, as well as safely continue supplying over a long period of time, chlorine fluoride, which due to the difficulties of high pressure filling thereof can only be filled into a gas container such as a cylinder in limited amounts, by reacting two or more types of gas material that can be safely liquefied and filled into a gas container or by reacting similar gas material with a solid material.

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Inventors:

TAKAHASHI YOSHINAO (JP)
KATO KOREHITO (JP)
SAKURAI YOSHIMASA (JP)
TAKIZAWA HIROKI (JP)
KIKUCHI SHO (JP)
KAWAGUCHI SHINICHI (JP)
IKETANI YOSHIHIKO (JP)
SHIBUSAWA YUKINOBU (JP)

Application Number:

PCT/JP2017/012984

Publication Date:

October 12, 2017

Filing Date:

March 29, 2017

Export Citation:

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Assignee:

KANTO DENKA KOGYO KK (JP)

International Classes:

C01B7/24; C07B39/00; H01L21/3065

Foreign References:

JP2002538068A	2002-11-12
JP2005531479A	2005-10-20
US3446592A	1969-05-27
GB676374A	1952-07-23
JP2007191378A	2007-08-02
JP2011026694A	2011-02-10

Other References: