Title:
CHROMATIC ABERRATION-FREE OPTICAL ELEMENT-ROTATION TYPE ELLIPSOMETER AND METHOD OF MEASURING MUELLER-MATRIX OF SPECIMEN USING SAME
Document Type and Number:
WIPO Patent Application WO/2016/148422
Kind Code:
A1
Abstract:
The present invention relates to an optical element rotation type ellipsometer and, more specifically, to an ellipsometer used for measuring and analyzing a change of a polarization state of a light reflected by or transmitted through a specimen to measure a Mueller matrix component of the specimen. An embodiment of the present invention may comprise: a light source for emitting an incident light toward a specimen; a fixed polarizer that is arranged between the light source and the specimen on a travel path of the incident light, and polarizes the incident light emitted from the light source; a constant speed rotation polarizer that is arranged between the fixed polarizer and the specimen on the travel path of the incident light and polarizes the light, which has passed through the fixed polarizer and is incident thereto, the constant speed rotation polarizer rotating in a constant speed; a constant speed rotation analyzer for polarizing the light, which has been polarized while passing through the constant speed rotation polarizer, has been reflected by or has passed through the specimen to thus have a changed polarization state, and is then incident thereto, the constant speed rotation analyzer rotating at a constant speed; a fixed analyzer for polarizing the light, which has been polarized while passing through the constant speed rotation analyzer and is then incident thereto; and a light detector for detecting an amount of exposure of the light, which has been polarized while passing through the fixed analyzer and is then incident thereto, and outputting a value of a radiant flux of the light, which corresponds to the detected amount of exposure.
Inventors:
CHO YONG JAI (KR)
CHEGAL WON (KR)
CHO HYUN MO (KR)
CHEGAL WON (KR)
CHO HYUN MO (KR)
Application Number:
PCT/KR2016/002287
Publication Date:
September 22, 2016
Filing Date:
March 08, 2016
Export Citation:
Assignee:
KOREA RES INST STANDARDS & SCI (KR)
International Classes:
G01D21/00; G01B11/06; G01B11/24; G01J4/04; G01N21/21
Foreign References:
| KR101270260B1 | ||||
| US20070146706A1 | 2007-06-28 | |||
| KR20020008697A | 2002-01-31 | |||
| KR20010053391A | 2001-06-25 | |||
| KR20100064612A | 2010-06-15 |
Attorney, Agent or Firm:
PLUS INTERNATIONAL IP LAW FIRM (KR)
특허법인 플러스 (KR)
특허법인 플러스 (KR)
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