CIRCULARITY MEASURING DEVICE AND TIP END MEMBER QUALITY JUDGING METHOD

Title:

CIRCULARITY MEASURING DEVICE AND TIP END MEMBER QUALITY JUDGING METHOD

Document Type and Number:

WIPO Patent Application WO/2007/066746

Kind Code:

A1

Abstract:

It is possible to realize a circularity measuring device having an improved measuring accuracy when eccentricity is present. The circularity measuring device includes: a table (1) for mounting an object; a tip end member (11) having a spherical tip end which can be displaced in a first plane containing a rotation axis of the table and displaced in contact with a surface of an object to be measured; measurement members (12-14) for detecting a displacement of the tip end and outputting measurement data; and a process control unit (15) for processing the measurement data. The process control unit corrects a shift of the contact position between the surface of the object to be measured and the tip end member in the first plane caused by eccentricity between the center of the object to be measured and the rotation center of the table for calculating the circularity. The process control unit calculates a shift of in the direction vertical to the first plane of the contact position caused by eccentricity and corrects the shift of the contact position in the first plane caused by the calculated shift, thereby calculating the circularity.

Inventors:

ENOMOTO MASATO (JP)
SAWAFUJI SUSUMU (JP)

Application Number:

PCT/JP2006/324504

Publication Date:

June 14, 2007

Filing Date:

December 01, 2006

Export Citation:

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Assignee:

TOKYO SEIMITSU CO LTD (JP)
ENOMOTO MASATO (JP)
SAWAFUJI SUSUMU (JP)

International Classes:

G01B5/20

Foreign References:

JPH04329306A	1992-11-18
JP2001091244A	2001-04-06
JP2004093529A	2004-03-25
JPH05269649A	1993-10-19
JPH04329306A	1992-11-18
JP2001091244A	2001-04-06
JP2004093529A	2004-03-25

Other References: